A compact ΔE-Eres detector for elastic recoil detection with high sensitivity

被引:48
作者
Bergmaier, A [1 ]
Dollinger, G [1 ]
Frey, CM [1 ]
机构
[1] Tech Univ Munich, Phys Dept E12, D-85747 Garching, Germany
关键词
D O I
10.1016/S0168-583X(97)00877-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new compact Delta E-E-res detector telescope has been installed in the scattering chamber of the Munich Q3D magnetic spectrograph in order to increase the sensitivity and depth resolution in classical elastic recoil detection (ERD) measurements. It consists of a two dimensional position sensitive ionisation chamber for energy loss and a position sensitive silicon PIN diode for residual energy measurements. ii large solid angle of detection of about 4.5 msr combined with good angular resolution in x and y directions enables high sensitivity ERD depth profiling with a sensitivity in the ppm range and a depth resolution of about 10 nm. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:638 / 643
页数:6
相关论文
共 7 条
[1]   SETUP FOR MATERIALS ANALYSIS WITH HEAVY-ION BEAMS AT THE MUNICH MP TANDEM [J].
ASSMANN, W ;
HARTUNG, P ;
HUBER, H ;
STAAT, P ;
STEFFENS, H ;
STEINHAUSEN, C .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4) :726-731
[2]   ELASTIC RECOIL DETECTION ANALYSIS WITH HEAVY-IONS [J].
ASSMANN, W ;
HUBER, H ;
STEINHAUSEN, C ;
DOBLER, M ;
GLUCKLER, H ;
WEIDINGER, A .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4) :131-139
[3]   QUANTITATIVE ELASTIC RECOIL DETECTION [J].
BERGMAIER, A ;
DOLLINGER, G ;
FREY, CM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 99 (1-4) :488-490
[4]   Limits in elastic recoil detection analysis with heavy ions [J].
Dollinger, G ;
Boulouednine, M ;
Bergmaier, A ;
Faestermann, T ;
Frey, CM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 118 (1-4) :291-300
[5]   OPTIMIZATION OF THE DEPTH RESOLUTION IN ELASTIC RECOIL DETECTION [J].
PASZTI, F ;
SZILAGYI, E ;
KOTAI, E .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 54 (04) :507-512
[6]   A METHOD FOR ANALYSIS AND PROFILING OF BORON, CARBON AND OXYGEN IMPURITIES IN SEMICONDUCTOR WAFERS BY RECOIL ATOMS IN HEAVY-ION BEAMS [J].
PETRASCU, M ;
BERCEANU, I ;
BRANCUS, I ;
BUTA, A ;
DUMA, M ;
GRAMA, C ;
LAZAR, I ;
MIHAI, I ;
PETROVICI, M ;
SIMION, V ;
MIHAILA, M ;
GHITA, I .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (03) :396-398
[7]   DETERMINATION OF CONCENTRATION PROFILES BY ELASTIC RECOIL DETECTION WITH A DELTA-E-E GAS TELESCOPE AND HIGH-ENERGY INCIDENT HEAVY-IONS [J].
STOQUERT, JP ;
GUILLAUME, G ;
HAGEALI, M ;
GROB, JJ ;
GANTER, C ;
SIFFERT, P .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 44 (02) :184-194