Electric and morphologic properties of SnO2 films prepared by modified sol-gel process

被引:21
作者
Dal Santos, MA
Antunes, AC
Ribeiro, C
Borges, CPF
Antunes, SRM
Zara, AJ
Pianaro, SA
机构
关键词
films; SnO2; sol-gel; characterization; sensor; LPG;
D O I
10.1016/S0167-577X(03)00328-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Tin dioxide (SnO2) is used in several technological applications such as sensors, catalysts, and electro-optical equipments. Many of these applications involve the use of SnO2 in the form of ceramic thin film. The preparation of SnO2 films has been widely studied and different methods have been proposed to synthesize pure or doped SnO2. In this work, SnO2 films produced by the modified sol-gel method, using tin tartrate as a precursor, are presented. The sol stability was verified using UV-visible spectroscopy. The obtained films were characterized by X-ray diffraction (XRD), optical microscopy, electrical measurements, scanning electron microscopy (SEM), and X-ray fluorescence (FRX). The obtained films presented a thickness of 0.3 mum and an amorphous structure. The sensor electrical sensibility at 300 degreesC in the presence of LPG was clearly shown. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:4378 / 4381
页数:4
相关论文
共 14 条
[1]  
AEGERTER MA, 1989, SOL GEL SCI TECHNOLO, P505
[2]  
DONG HK, 2000, SENSOR ACTUAT B-CHEM, V62, P61
[3]   Sol-gel processing and characterization of pure and metal-doped SnO2 thin films [J].
Epifani, M ;
Alvisi, M ;
Mirenghi, L ;
Leo, G ;
Siciliano, P ;
Vasanelli, L .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2001, 84 (01) :48-54
[4]   THE SOLID-STATE AND SOLUTION STRUCTURES OF TIN(IV) ALKOXIDE COMPOUNDS AND THEIR USE AS PRECURSORS TO FORM TIN OXIDE CERAMICS VIA SOL GEL-TYPE HYDROLYSIS AND CONDENSATION [J].
HAMPDENSMITH, MJ ;
WARK, TA ;
BRINKER, CJ .
COORDINATION CHEMISTRY REVIEWS, 1992, 112 :81-116
[5]  
*ICDD, 1994, POWD DIFFR FIL PDF 2
[6]   Application of nano-crystalline porous tin oxide thin film for CO sensing [J].
Jin, ZH ;
Zhou, HJ ;
Jin, ZL ;
Savinell, RF ;
Liu, CC .
SENSORS AND ACTUATORS B-CHEMICAL, 1998, 52 (1-2) :188-194
[7]   ''Sol-Gel'' preparation of high temperature superconducting oxides [J].
Kakihana, M .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1996, 6 (01) :7-55
[8]  
NAKAMOTO K, 1978, INFRARED SPECTRA INO, V1, P135
[9]   ETHANOL GAS-SENSING PROPERTIES OF SNO2-BASED THIN-FILM SENSORS PREPARED BY THE SOL-GEL PROCESS [J].
PARK, SS ;
ZHENG, HX ;
MACKENZIE, JD .
MATERIALS LETTERS, 1993, 17 (06) :346-352
[10]   COMPENSATION OF THE INFLUENCE OF HUMIDITY ON THE MEASUREMENT OF AN SO2 SENSOR BY SIGNAL-PROCESSING [J].
PICHLMAIER, J .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 27 (1-3) :286-288