Electrical characterization of GaN p-n junctions with and without threading dislocations

被引:334
作者
Kozodoy, P [1 ]
Ibbetson, JP
Marchand, H
Fini, PT
Keller, S
Speck, JS
DenBaars, SP
Mishra, UK
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] Univ Calif Santa Barbara, Dept Mat Sci, Santa Barbara, CA 93106 USA
关键词
D O I
10.1063/1.122057
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effect of dislocations on the electrical characteristics of GaN p-n junctions has been examined through current-voltage measurements. Lateral epitaxial overgrowth (LEO) was used to produce areas of low dislocation density in close proximity to areas with the high dislocation density typical for growth on sapphire. A comparison of p-n diodes fabricated in each region reveals that reverse-bias leakage current is reduced by three orders of magnitude on LEO GaN. Temperature-dependent measurements on the LEO diodes indicate that the remaining leakage current in these devices is associated with a deep trap level. (C) 1998 American Institute of Physics.
引用
收藏
页码:975 / 977
页数:3
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