A self-filling micropump based on PCB technology

被引：90

作者：

Wego, A ^{[1
]}

Pagel, L ^{[1
]}

机构：

[1] Univ Rostock, Inst Elect Appliances & Circuits, Dept Elect Engn, D-18055 Rostock, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 88卷 / 03期

关键词：

PCB; self-filling micropump; fluidics; passive microvalve; thermopneumatic volume actuator;

D O I：

10.1016/S0924-4247(00)00519-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel micropump based on printed circuit board technology (PCB). The pump consists of four PCB layers and one membrane layer forming two passive check valves and one thermopneumatically driven volume actuator. Due to the large deflections of the actuator membrane, the device is completely self-filling and able to pump liquids even with gas bubbles. A maximum flow rate of 530 mul/ min (using water) and a back-pressure of 119 mbar are obtained by an average power consumption of 1W and an exciting frequency of 1 Hz. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：220 / 226

页数：7

共 10 条

[1]

Beams J.W., 1959, The structure and properties of thin film

[2]

BUSTGENS B, 1994, IEEE WORKSH MEMS

[3]

GRABER M, 1999, THESIS U ROSTOCK ROS

[4]

KAMPER KP, 1998, IEEE WORKSH MEMS

[5] Reflexions on the future of microsystems [J].

Lang, W .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 72 (01) :1-15

[6] A microfluidic pH-regulation system based on printed circuit board technology [J].

Läritz, C ;

Pagel, L .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 84 (03) :230-235

[7]

LINNEMAN R, 1998, IEEE WORKSH MEMS

[8] Electric fields in fluidic channels and sensor applications with capacitance [J].

Merkel, T ;

Pagel, L ;

Glock, HW .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 80 (01) :1-7

[9] A new technology for fluidic microsystems based on PCB technology [J].

Merkel, T ;

Graeber, M ;

Pagel, L .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 77 (02) :98-105

[10]

MERKEL T, 1999, THESIS U ROSTOCK ROS

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