A new technology for fluidic microsystems based on PCB technology

被引：103

作者：

Merkel, T ^{[1
]}

Graeber, M ^{[1
]}

Pagel, L ^{[1
]}

机构：

[1] Univ Rostock, Dept Elect Engn, Inst GS, D-18055 Rostock, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 77卷 / 02期

关键词：

technology; fluidics; sensor; actuators; PCB;

D O I：

10.1016/S0924-4247(99)00062-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new technology for fluidic microsystems has been developed at Restock University. This new technology is based on the manufacturing principles of printed circuit boards (PCB). The same manufacturing steps closely connect fluidic and electric components. Unlike the requirements for other technologies, e.g., silicon technology, only moderately complex equipment is necessary. The microsystems fabricated by this new technology can handle fluids (transport, mix, flow control, heating) and can measure properties such as temperature, viscosity, density, colour and pH-values. Various applications are possible in chemistry, biology, medicine and many other technical fields. Compatibility with electronic technologies is the main objective of this development. The technology allows low production costs even for small quantities, so it is suitable for small companies and for special applications. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：98 / 105

页数：8

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