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Future of actuators and microsystems

被引：58
作者：
Fujita, H
机构：
[1] Institute of Industrial Science, University of Tokyo, Tokyo 106, 7-22-1 Roppongi, Minato-ku
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 56卷 / 1-2期
关键词：
actuators; microsystems;
D O I：
10.1016/0924-4247(96)01282-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper describes a view of future prospects of microactuators, micro miniature motion systems (in short, microsystems), and the fabrication technology involved. Microsystems may contribute to 21st century society in three major areas: (1) wider distribution of and easier access to information; (2) lifestyle compatible with the environment; and (3) improvement in social welfare. The feasibility of fundamental devices such as microactuators has been confirmed. Building a complete microsystem is the next research target. Promising areas of application are discussed.
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收藏
页码：105 / 111
页数：7
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