AN ANALYSIS OF ELECTROQUASISTATIC INDUCTION MICROMOTORS

[1] ELECTRICAL-CONDUCTION IN IMPLANTED POLYCRYSTALLINE SILICON [J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (03) : 227 - 247

[2] DESIGN CONSIDERATIONS FOR MICROMACHINED ELECTRIC ACTUATORS [J]. SENSORS AND ACTUATORS, 1988, 14 (03): : 269 - 292

[3] BART SF, 1989, FEB P IEEE MICR EL M, P7

[4] BOLLEE B, 1969, PHILIPS TECH REV, V30, P178

[5] Floating body in the electric and magnetic field [J]. ZEITSCHRIFT FUR PHYSIK, 1939, 112 (11-12): : 753 - 763

[6] CHOI SD, 1971, PR INST ELECTR ELECT, V59, P737, DOI 10.1109/PROC.1971.8253

[7] INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 724 - 730

[8] FAN LS, 1987, JUN IEEE INT C SOL S, P849

[9] FAN LS, 1988, 1988 IEEE INT EL DEV, P666

[10] FUJITA H, 1987, NOV P IEEE MICR ROB

[1] ELECTRICAL-CONDUCTION IN IMPLANTED POLYCRYSTALLINE SILICON [J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (03) : 227 - 247

[2] DESIGN CONSIDERATIONS FOR MICROMACHINED ELECTRIC ACTUATORS [J]. SENSORS AND ACTUATORS, 1988, 14 (03): : 269 - 292

[3] BART SF, 1989, FEB P IEEE MICR EL M, P7

[4] BOLLEE B, 1969, PHILIPS TECH REV, V30, P178

[5] Floating body in the electric and magnetic field [J]. ZEITSCHRIFT FUR PHYSIK, 1939, 112 (11-12): : 753 - 763

[6] CHOI SD, 1971, PR INST ELECTR ELECT, V59, P737, DOI 10.1109/PROC.1971.8253

[7] INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 724 - 730

[8] FAN LS, 1987, JUN IEEE INT C SOL S, P849

[9] FAN LS, 1988, 1988 IEEE INT EL DEV, P666

[10] FUJITA H, 1987, NOV P IEEE MICR ROB