Future of actuators and microsystems

This paper describes a view of future prospects of microactuators, micro miniature motion systems (in short, microsystems), and the fabrication technology involved. Microsystems may contribute to 21st century society in three major areas: (1) wider distribution of and easier access to information; (2) lifestyle compatible with the environment; and (3) improvement in social welfare. The feasibility of fundamental devices such as microactuators has been confirmed. Building a complete microsystem is the next research target. Promising areas of application are discussed.