A THERMO-PNEUMATIC ACTUATION PRINCIPLE FOR A MICROMINIATURE PUMP AND OTHER MICROMECHANICAL DEVICES

被引：44

作者：

VANDEPOL, FCM

WONNINK, DGJ

ELWENSPOEK, M

FLUITMAN, JHJ

机构：

来源：

SENSORS AND ACTUATORS | 1989年 / 17卷 / 1-2期

关键词：

D O I：

10.1016/0250-6874(89)80073-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：139 / 143

页数：5

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[3]

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