A silicon thermocapacitive flow sensor with frequency modulated output

被引：6

作者：

Kwok, CY

Lin, KM

Huang, RS

机构：

[1] School of Electrical Engineering, University of New South Wales, Sydney

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 57卷 / 01期

关键词：

flow sensors; thermocapacitive; strontium titanate;

D O I：

10.1016/S0924-4247(97)80092-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A silicon thermocapacitive gas-flow sensor with frequency modulated output where the shift in the oscillation frequency is related to the gas-flow velocity has been developed. The sensing module, which is fabricated using a MOS-compatible process combined with EDP groove etching, is a capacitor. The dielectric material of the capacitor is r.f.-sputtered SrTiO3, the large dielectric constant of which is also temperature dependent. Together with an external 555 IC, the oscillator frequency at zero flow velocity and 250 mW of heater power is 8.7 kHz. The sensitivity is 118 Hz (m s(-1))(-1) in the linear region, with 250 mW of heater power.

引用

页码：35 / 39

页数：5

共 15 条

[1] RESONATING MICROBRIDGE MASS-FLOW SENSOR [J].