AN INTEGRATED CAPACITIVE PRESSURE SENSOR WITH FREQUENCY-MODULATED OUTPUT

被引：26

作者：

HANNEBORG, A

HANSEN, TE

OHLCKERS, PA

CARLSON, E

DAHL, B

HOLWECH, O

机构：

来源：

SENSORS AND ACTUATORS | 1986年 / 9卷 / 04期

关键词：

D O I：

10.1016/0250-6874(86)80066-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

收藏

页码：345 / 351

页数：7

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[1] PRESSURE SENSITIVITY IN ANISOTROPICALLY ETCHED THIN-DIAPHRAGM PRESSURE SENSORS
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[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1887 - 1896
[2] A HIGH-SENSITIVITY INTEGRATED-CIRCUIT CAPACITIVE PRESSURE TRANSDUCER
KO, WH
BAO, MH
HONG, YD
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (01) : 48 - 56
[3] A PIEZORESISTIVE INTEGRATED PRESSURE SENSOR
YAMADA, K
NISHIHARA, M
KANZAWA, R
KOBAYASHI, R
[J]. SENSORS AND ACTUATORS, 1983, 4 (01): : 63 - 69