A HIGH-SENSITIVITY INTEGRATED-CIRCUIT CAPACITIVE PRESSURE TRANSDUCER

[1] BAO MH, 1980, 33RD P ANN C ENG MED

[2] PRESSURE SENSITIVITY IN ANISOTROPICALLY ETCHED THIN-DIAPHRAGM PRESSURE SENSORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1887 - 1896

[3] CLAUSER, 1963, ENCY ENG PROCESSES, P616

[4] GRILL TM, 1978, THESIS CASE WESTERN

[5] DIODE-QUAD BRIDGE CIRCUIT FOR USE WITH CAPACITANCE TRANSDUCERS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (10) : 1468 - 1472

[6] KO WH, 1979, IEEE T ELECTRON DEV, V26, P1897

[7] LOVE AEH, 1944, TREATISE MATH THEORY, P495

[8] LYMAN T, 1961, METALS HDB, V1, P1222

[9] NUNN TA, 1977, 46101 STANF TECH REP

[10] SAMAUN S, 1973, IEEE T BIOMEDICAL EN, V20, P101

[1] BAO MH, 1980, 33RD P ANN C ENG MED

[2] PRESSURE SENSITIVITY IN ANISOTROPICALLY ETCHED THIN-DIAPHRAGM PRESSURE SENSORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1887 - 1896

[3] CLAUSER, 1963, ENCY ENG PROCESSES, P616

[4] GRILL TM, 1978, THESIS CASE WESTERN

[5] DIODE-QUAD BRIDGE CIRCUIT FOR USE WITH CAPACITANCE TRANSDUCERS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (10) : 1468 - 1472

[6] KO WH, 1979, IEEE T ELECTRON DEV, V26, P1897

[7] LOVE AEH, 1944, TREATISE MATH THEORY, P495

[8] LYMAN T, 1961, METALS HDB, V1, P1222

[9] NUNN TA, 1977, 46101 STANF TECH REP

[10] SAMAUN S, 1973, IEEE T BIOMEDICAL EN, V20, P101