共 15 条
[12]
LIGHTLY-DOPED POLYSILICON BRIDGE AS A FLOW METER
[J].
SENSORS AND ACTUATORS,
1988, 15 (01)
:63-75
[13]
Van Putten A. F. P., 1983, Sensors and Actuators, V4, P387, DOI 10.1016/0250-6874(83)85049-5
[14]
VANHERWAARDEN AW, 1989, SENSOR ACTUAT A-PHYS, V21, P621
[15]
Wachutka G., 6 INT C SOL STAT SEN, P22