RESONATING MICROBRIDGE MASS-FLOW SENSOR

被引：62

作者：

BOUWSTRA, S

LEGTENBERG, R

TILMANS, HAC

ELWENSPOEK, M

机构：

[1] University of Twente, Sensors and Actuators Research Unit, 7500 AE Enschede

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85066-D

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A resonating microbridge mass flow sensor with a frequency output is presented, based on standard IC and thin-film technologies, and on front-side anisotropic etching. The operation, realization, theory and experiments are described. The sensitivity is compared with that of a resonating membrane prototype. Preliminary results show a base resonance frequency of 85 kHz at a temperature elevation of the microbridge of 20 °C, with a shift of 0.8 kHz in the mass flow range from 0 to 10 sccm. © 1990.

引用

页码：332 / 335

页数：4

共 13 条

[1] THERMALLY EXCITED RESONATING MEMBRANE MASS-FLOW SENSOR
BOUWSTRA, S
KEMNA, P
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[8] PERFORMANCE OF THERMALLY EXCITED RESONATORS
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[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 352 - 356
[9] LAMMERINK TSJ, 1985, 3RD P INT C SOL STAT, P97
[10] PETERSEN KE, 1985, JUN IEE INT C SOL ST, P361

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