THE DYNAMIC MECHANICAL CHARACTERISTICS OF A RESONATING MICROBRIDGE MASS-FLOW SENSOR

被引:16
作者
GEIJSELAERS, HJM
TIJDEMAN, H
机构
[1] Applied Mechanics, Mechanical Engineering, University of Twente, 7500 AE Enschede
关键词
D O I
10.1016/0924-4247(91)80029-O
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper gives an explanation of the dynamic mechanical behaviour of a resonating microbridge mass-flow sensor. A rise in the average temperature of the bridge initially results in a reduction of the resonance frequency. Upon further temperature rise, a reversal occurs and the resonance frequency starts rising too. The dynamic behaviour in this case is found to be governed by static buckling. This phenomenon is analysed, first using a finite-element model and then with an approximate analytical calculation.
引用
收藏
页码:37 / 41
页数:5
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