LOW-COST SILICON SENSORS FOR MASS-FLOW MEASUREMENT OF LIQUIDS AND GASES

被引：40

作者：

NGUYEN, NT

KIEHNSCHERF, R

机构：

[1] Department of Electrical Engineering and Information Technology, Technical University of Chemnitz-Zwickau, Chemnitz

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 49卷 / 1-2期

关键词：

SILICON SENSORS; ELECTROCALORIC PRINCIPLE; MASS FLOW RATES; MICRO-TECHNOLOGY;

D O I：

10.1016/0924-4247(95)01016-T

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-cost silicon sensor for measuring the mass flow rate of gases and liquids has been developed. Its operation is based on heat transfer from heated resistors to a flowing fluid (electrocaloric principle). The difference between the temperature of the sensors on the chip, the heating power, and the heater temperature can be used to measure the mass flow. It is important to realize that sensors are produced in silicon through the usage of micro-technology. Nitrogen and water are used for testing the sensor. The sensor has a high dynamic response and is suitable for dynamic fluid measurements. The possible measuring how rates range from 0 to 500 ml/min for gases and 0 to 500 or 0 to 10 ml/min for liquids.

引用

页码：17 / 20

页数：4

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