Design of a double-pass shear mode acousto-optic modulator

被引:10
作者
Chang, Chih-Hao [1 ]
Heilmann, R. K. [1 ]
Schattenburg, M. L. [1 ]
Glenn, P. [2 ]
机构
[1] MIT, Space Nanotechnol Lab, Cambridge, MA 02139 USA
[2] Bauer Associates Inc, Natick, MA 01760 USA
基金
美国国家航空航天局;
关键词
D O I
10.1063/1.2894210
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The design of a compact double-pass shear mode acousto-optic modulator for high power operation in the UV is presented. Using a spherical mirror retroreflector in the second pass to correct for beam deflection, changes in beam position and angle during frequency tuning can be eliminated. The use of the shear mode acousto-optic interaction offers several key advantages, but the strain-induced birefringence creates significant levels of spectral leakage in the system. These effects and the polarization of the beams are analyzed to minimize leakage. Using a heterodyne interferometry scheme, two double-pass acousto-optic modulators with offset acoustic frequency inputs are set up to measure the leakage intensity. The designed double-pass shear mode acousto-optic modulator was tested with lambda = 351.1 nm and demonstrated a peak double-pass efficiency of 42.6% and a bandwidth of 28 MHz. Over this bandwidth the spectral leakage was reduced to similar to 0.01%-0.04% relative intensity. (C) 2008 American Institute of Physics.
引用
收藏
页数:5
相关论文
共 10 条
[1]  
Alippi A., 1973, Optics Communications, V8, P397, DOI 10.1016/0030-4018(73)90226-5
[2]  
[Anonymous], ACOUSTO OPTICS
[3]   POLARIZATION EFFECTS IN ACOUSTOOPTIC INTERACTION [J].
BALAKSHY, VI ;
HASSAN, JA .
OPTICAL ENGINEERING, 1993, 32 (04) :746-751
[4]   RECENT ADVANCES IN DISPLACEMENT MEASURING INTERFEROMETRY [J].
BOBROFF, N .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1993, 4 (09) :907-926
[5]   Image metrology and system controls for scanning beam interference lithography [J].
Chen, CG ;
Konkola, PT ;
Heilmann, RK ;
Pati, GS ;
Schattenburg, ML .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2335-2341
[6]   High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics [J].
Demarest, FC .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1998, 9 (07) :1024-1030
[7]   Double-pass acousto-optic modulator system [J].
Donley, EA ;
Heavner, TP ;
Levi, F ;
Tataw, MO ;
Jefferts, SR .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (06)
[8]   ELECTRONICALLY TUNABLE ACOUSTO-OPTIC FILTER [J].
HARRIS, SE ;
NIEH, STK ;
WINSLOW, DK .
APPLIED PHYSICS LETTERS, 1969, 15 (10) :325-+
[9]   Digital heterodyne interference fringe control system [J].
Heilmann, RK ;
Konkola, PT ;
Chen, CG ;
Pati, GS ;
Schattenburg, ML .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2342-2346
[10]  
Yariv A., 1984, OPTICAL WAVES CRYSTA