Analysis of nano-indentation measurements on carbon nitride films

被引：20

作者：

Kusano, Y ^{[1
]}

Hutchings, IM ^{[1
]}

机构：

[1] Univ Cambridge, Inst Mfg, Dept Engn, Cambridge CB2 1RX, England

来源：

SURFACE & COATINGS TECHNOLOGY | 2003年 / 169卷

基金：

英国工程与自然科学研究理事会;

关键词：

carbon nitride; nano-indentation; hardness; modulus;

D O I：

10.1016/S0257-8972(03)00132-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Analysis of nano-indentation experiments on thin carbon nitride films is complicated by the high elastic recovery and high unloading curvature observed with these materials. Methods of data analysis are compared, and a recent model by Cheng and Cheng [Surf. Coat. Technol. 133-134 (2000) 417], which uses the work done during indentation, is applied to carbon nitride films for the first time. This is found to give better estimates of hardness and modulus than the other methods. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：739 / 742

页数：4