The deposition and annealing study of MOCVD ZnMgO

被引：41

作者：

Liu, W ^{[1
]}

Gu, SL ^{[1
]}

Zhu, SM ^{[1
]}

Ye, JD ^{[1
]}

Qin, F ^{[1
]}

Liu, SM ^{[1
]}

Zhou, X ^{[1
]}

Hu, LQ ^{[1
]}

Zhang, R ^{[1
]}

Shi, Y ^{[1
]}

Zheng, YD ^{[1
]}

机构：

[1] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China

来源：

JOURNAL OF CRYSTAL GROWTH | 2005年 / 277卷 / 1-4期

基金：

中国国家自然科学基金;

关键词：

annealing; auger electron spectroscopy (AES); x-ray diffraction; MOCVD; MgxZn1-xO; ZnO;

D O I：

10.1016/j.jcrysgro.2005.01.086

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Wurtzite-type MgxZn1-xO thin films were epitaxially grown at 550 degrees C on Al2O3(0001) substrate using low-pressure metal organic chemical vapor deposition (LP-MOCVD). The as-grown MgxZn1-xO shows poor optical quality with absence of the hand edge emission in the photoluminescence. Post-annealing in oxygen ambient has significantly improved the structural and optical properties of the films, with observation of strong near band edge emissions. Annealing inducing red-shift of the optical absorption for high xMg(x)Zn(1-x)O is due to a reduced Mg composition x, which agreed well with the observation of the XRDs. The annealing induced decrease in x has further been ascribed to Mg atom movement from the buried layer to the film surface, resulting in an inhomogeneous distribution of Mg atom across the film and an observation of lower xMg(x)Zn(1-x)O. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：416 / 421

页数：6

共 12 条

[1] Optically pumped lasing of ZnO at room temperature [J].

Bagnall, DM ;

Chen, YF ;

Zhu, Z ;

Yao, T ;

Koyama, S ;

Shen, MY ;

Goto, T .

APPLIED PHYSICS LETTERS, 1997, 70 (17) :2230-2232

[2] Band gap engineering based on MgxZn1-xO and CdyZn1-yO ternary alloy films [J].

Makino, T ;

Segawa, Y ;

Kawasaki, M ;

Ohtomo, A ;

Shiroki, R ;

Tamura, K ;

Yasuda, T ;

Koinuma, H .

APPLIED PHYSICS LETTERS, 2001, 78 (09) :1237-1239

[3] Single crystalline ZnO films grown on lattice-matched ScAlMgO4(0001) substrates [J].

Ohtomo, A ;

Tamura, K ;

Saikusa, K ;

Takahashi, K ;

Makino, T ;

Segawa, Y ;

Koinuma, H ;

Kawasaki, M .

APPLIED PHYSICS LETTERS, 1999, 75 (17) :2635-2637

[4] Metalorganic vapor-phase epitaxial growth and photoluminescent properties of Zn1-xMgxO(0≤x≤0.49) thin films [J].

Park, WI ;

Yi, GC ;

Jang, HM .

APPLIED PHYSICS LETTERS, 2001, 79 (13) :2022-2024

[5] Metal-organic vapor phase epitaxial growth of high-quality ZnO films on Al2O3(00.1) [J].

Park, WI ;

An, SJ ;

Yi, GC ;

Jang, HM .

JOURNAL OF MATERIALS RESEARCH, 2001, 16 (05) :1358-1362

[6]

POSTAVA K, 2001, APPL SURF SCI, V543, P175

[7] Optical and structural properties of epitaxial MgxZn1-xO alloys [J].

Sharma, AK ;

Narayan, J ;

Muth, JF ;

Teng, CW ;

Jin, C ;

Kvit, A ;

Kolbas, RM ;

Holland, OW .

APPLIED PHYSICS LETTERS, 1999, 75 (21) :3327-3329

[8] Excitonic gain and stimulated ultraviolet emission in nanocrystalline zinc-oxide powder [J].

Sun, Y ;

Ketterson, JB ;

Wong, GKL .

APPLIED PHYSICS LETTERS, 2000, 77 (15) :2322-2324

[9] Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films [J].

Tang, ZK ;

Wong, GKL ;

Yu, P ;

Kawasaki, M ;

Ohtomo, A ;

Koinuma, H ;

Segawa, Y .

APPLIED PHYSICS LETTERS, 1998, 72 (25) :3270-3272

[10]

TUZENMEN S, 2001, MAT SCI ENG B-SOLID, V80, P383

← 1 2 →