Non-destructive evaluation of thin film coatings using a laser-induced surface thermal lensing effect

被引:10
作者
Wu, ZL
Kuo, PK
Lu, YS
Gu, ST
Krupka, R
机构
[1] WAYNE STATE UNIV, DEPT PHYS, DETROIT, MI 48201 USA
[2] WAYNE STATE UNIV, INST MFG RES, DETROIT, MI 48201 USA
关键词
non-destructive testing; photothermal deformation; surface thermal lensing; thin film coatings;
D O I
10.1016/S0040-6090(96)09055-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Laser-induced surface deformation is a widely used technique for studying thin film coatings. In this technique the deformation is typically detected using the well known optical beam deflection technique. In this paper we report a different technique for studying surface deformation by using an optical diffraction effect. In this detection scheme, the laser-induced thermal bump behaves as a curved reflection mirror which can either focus or defocus a second probe laser beam through optical diffraction, depending on the specific geometry used. This surface thermal lensing effect is demonstrated to be a sensitive and easy-to-handle method for thin film characterization. The potentials of this technique and its advantages over the conventional method for thin film absorption measurement and defect characterization are discussed.
引用
收藏
页码:271 / 277
页数:7
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