Transmission electron microscope specimen preparation of Zn powders using the focused ion beam lift-out technique

被引:61
作者
Prenitzer, BI [1 ]
Giannuzzi, LA
Newman, K
Brown, SR
Irwin, RB
Shofner, TL
Stevie, FA
机构
[1] Univ Cent Florida, Dept Mech Mat & Aerosp Engn, Orlando, FL 32816 USA
[2] Keystone Powdered Met Co, Proc Dev, St Marys, PA 15857 USA
[3] Cirent Semicond, Orlando, FL 32819 USA
[4] Kirk Resources, Orlando, FL 32819 USA
[5] Bartech Grp, Orlando, FL 32819 USA
来源
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE | 1998年 / 29卷 / 09期
关键词
Material Transaction; Transmission Electron Micro Specimen; Metal Powder Industry Federation; Scanning Electron Microscopy Specimen; Transmission Electron Micro Specimen Preparation;
D O I
10.1007/s11661-998-0116-z
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Particles of Zn powder have been studied to show that high-quality scanning electron microscope (SEM) and transmission electron microscope (TEM) specimens can be rapidly produced from a site-specific region on a chosen particle by the focused ion beam (FIB) lift-out technique. A TEM specimen approximately 20-mu m long by 5-mu m wide was milled to electron transparency, extracted from the bulk particle, and micromanipulated onto a carbon coated copper mesh TEM grid. Using the FIB lift-out method, we were able to prepare a site-specific TEM specimen from a difficult material in under 3 hours. The TEM analysis of the lift-out specimen revealed a large amount of thin area free from characteristic signs of damage that may be observed as a result of conventional argon ion milling. The overall microstructure of the specimen prepared by the FIB lift-out method was consistent with samples prepared by conventional metallographic methods. A grain size of similar to 10 to 20 mu m was observed in all specimens by both TEM and SEM analysis. Light optical microscopy revealed the presence of internal voids in similar to 10 to 20 pct of all particles. The SEM analysis showed the voids to extend over similar to 70 pct of the particle volume in some cases.
引用
收藏
页码:2399 / 2406
页数:8
相关论文
共 37 条
[1]  
BOSE A, 1995, JOM-J MIN MET MAT S, V47, P26
[2]   IMAGING MICROANALYSIS OF SURFACES WITH A FOCUSED GALLIUM PROBE [J].
CHABALA, JM ;
LEVISETTI, R ;
WANG, YL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03) :910-914
[3]   STRUCTURAL DAMAGE INDUCED BY GA+ FOCUSED ION-BEAM IMPLANTATION IN (001) SI [J].
CHU, CH ;
HSIEH, YF ;
HARRIOTT, LR ;
WADE, HH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :3451-3455
[4]  
EADIE RL, 1996, INT J POWDER METALL, P265
[5]  
GETHIN DT, 1994, INT J POWDER METALL, V30, P385
[6]  
Giannuzzi LA, 1998, MICROSC RES TECHNIQ, V41, P285, DOI 10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO
[7]  
2-Q
[8]  
GIANNUZZI LA, 1992, THESIS PENNSYLVANIA
[9]  
GURGANUS TB, 1995, ADV MATER PROCESS, V148, P57
[10]  
IANNUZZI LA, 1997, WORKSH SPEC PREP TEM, P19