Angular rate sensor and accelerometer combined on the same micromachined CMOS chip

被引：12

作者：

Sparks, DR ^{[1
]}

Huang, X ^{[1
]}

Higdon, W ^{[1
]}

Johnson, JD ^{[1
]}

机构：

[1] Delphi Delco Elect Syst, Kokomo, IN 46904 USA

来源：

MICROSYSTEM TECHNOLOGIES | 1998年 / 4卷 / 03期

关键词：

Rate Sensor; Signal Output; Angular Rate; Automotive Application; Angular Rate Sensor;

D O I：

10.1007/s005420050117

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes an electroformed micromachining technology capable of producing both angular rate sensors and accelerometers. The sensors fabricated are CMOS integrated for improved signal output. Automotive applications for these devices will also be discussed.

引用

页码：139 / 142

页数：4