Copper nitride and tin nitride thin films for write-once optical recording media

被引：199

作者：

Maruyama, T

Morishita, T

机构：

[1] Department of Chemical Engineering, Faculty of Engineering, Kyoto University, Sakyo-ku

来源：

APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 07期

关键词：

D O I：

10.1063/1.117978

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The feasibility of using copper nitride and tin nitride thin films as write-once optical recording media was explored. The Cu3N and SnNx films were obtained by the reactive sputtering method. They were thermally decomposed into Cu and Sn films at 470 and 550 degrees C, respectively. The Cu him obtained by the thermal decomposition showed a large difference in reflectance which is applicable to the optical recording media. The Sn film obtained by the thermal decomposition included SnO, and consequently it showed a small difference in reflectance from that of SnNx film. (C) 1996 American Institute of Physics.

引用

页码：890 / 891

页数：2