Phenomenology of the α-hydrogen desorption state on Si(110) surfaces

被引:6
作者
Dinger, A
Lutterloh, C
Küppers, J
机构
[1] Univ Bayreuth, D-95440 Bayreuth, Germany
[2] EURATOM Assoc, Max Planck Inst Plasmaphys, D-85748 Garching, Germany
关键词
silicon hydrogen atom; physical adsorption; thermal desorption spectroscopy;
D O I
10.1016/S0039-6028(01)00786-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Adsorption of hydrogen on Si(1 1 0) surfaces was studied with thermal desorption spectroscopy. Hydrogen desorption spectra measured after admission of H from a thermal atom source to clean Si(1 1 0) revealed in addition to the mono- and dihydride peaks at 800 and 686 K, respectively, desorption from an a-state near 940 K. This state could be populated at Ar sputter/1060 K annealed surfaces only during admission of H between 300 and 800 K and after saturation of the monohydride state. The amount of H in the alpha -state was atmost 20% of that in the monohydride after sputtering at 800 K followed by annealing. High temperatures and high ion energies (0.5-2 keV) during sputtering enhances its population during subsequent H admission. Without annealing, at a surface sputtered with 2 keV ions, the amount of hydrogen bound in the a-state was as big as the amount of H in the monohydride. Annealing restored the normal mono/alpha population ratio. Using Ar evolution from sputtered surfaces as a monitor for rearrangement of surface atoms it was found that a-desorption coincides with the onset of Si atom mobility. From this it is concluded that the alpha -state is a defect related state below the surface plane. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:227 / 232
页数:6
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