Micromachined arrays of cantilevered glass probes

被引：14

作者：

Srinivasan, P ^{[1
]}

Beyette, FR ^{[1
]}

Papautsky, I ^{[1
]}

机构：

[1] Univ Cincinnati, Dept Elect & Comp Engn & Comp Sci, Cincinnati, OH 45221 USA

来源：

APPLIED OPTICS | 2004年 / 43卷 / 04期

关键词：

D O I：

10.1364/AO.43.000776

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe the fabrication and characterization of cantilevered glass probe arrays. Individual probes have tapered shafts that are 175 mum square at the base and 200 nm square at the pyramidal tip. Each array contains as many as eight probes 10-20 mm long at 450-mum center-to-center spacing, fabricated from a single glass wafer by a combination of dicing and chemical etching. Optical signal losses of individual probes were measured to be of the order of 1 dB/cm. High-density data storage and page-oriented retrieval are the potential applications of the arrays. (C) 2004 Optical Society of America.

引用

页码：776 / 782

页数：7

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