High resistivity and ultrafast carrier lifetime in argon implanted GaAs

被引:10
作者
Walukiewicz, W [1 ]
LilientalWeber, Z [1 ]
Jasinski, J [1 ]
Almonte, M [1 ]
Prasad, A [1 ]
Haller, EE [1 ]
Weber, ER [1 ]
Grenier, P [1 ]
Whitaker, JF [1 ]
机构
[1] UNIV MICHIGAN,CTR ULTRAFAST OPT SCI,ANN ARBOR,MI 48109
关键词
D O I
10.1063/1.117702
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated the optoelectronic and structural properties of GaAs that has been implanted with Ar ions and subsequently annealed, The material exhibits all the basic optical and electronic characteristics typically observed in nonstoichiometric. As implanted or low-temperature-grown GaAs. Annealing of Ar implanted GaAs at 600 degrees C produces a highly resistive material with a subpicosecond trapping lifetime for photoexcited carriers. Transmission electron microscopy shows that, instead of As precipitates, characteristic for the nonstoichiometeric GaAs, voids ranging in size from 3 to 5 nm are observed in Ar implanted and annealed GaAs. (C) 1996 American Institute of Physics.
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页码:2569 / 2571
页数:3
相关论文
共 17 条
[11]  
LILIENTALWEBER Z, 1991, MAT RES SOC P, V198, P371
[12]   MOLECULAR-BEAM EPITAXIAL GAAS GROWN AT LOW-TEMPERATURES [J].
LOOK, DC .
THIN SOLID FILMS, 1993, 231 (1-2) :61-73
[13]  
MAKOK JH, 1992, MAT RES S P, V240, P817
[14]   EVIDENCE FOR DONOR-GALLIUM VACANCY PAIRS IN SILICON DOPED GAAS GROWN BY MOLECULAR-BEAM EPITAXY AT LOW-TEMPERATURES [J].
MCQUAID, SA ;
NEWMAN, RC ;
MISSOUS, M ;
OHAGAN, S .
APPLIED PHYSICS LETTERS, 1992, 61 (25) :3008-3010
[15]  
MELLOCH MR, 1994, P SEM 3 5 MAT C WARS, P319
[16]   NEW MBE BUFFER USED TO ELIMINATE BACKGATING IN GAAS-MESFETS [J].
SMITH, FW ;
CALAWA, AR ;
CHEN, CL ;
MANFRA, MJ ;
MAHONEY, LJ .
IEEE ELECTRON DEVICE LETTERS, 1988, 9 (02) :77-80
[17]   ARSENIC PRECIPITATES AND THE SEMI-INSULATING PROPERTIES OF GAAS BUFFER LAYERS GROWN BY LOW-TEMPERATURE MOLECULAR-BEAM EPITAXY [J].
WARREN, AC ;
WOODALL, JM ;
FREEOUF, JL ;
GRISCHKOWSKY, D ;
MCINTURFF, DT ;
MELLOCH, MR ;
OTSUKA, N .
APPLIED PHYSICS LETTERS, 1990, 57 (13) :1331-1333