Thermalization of sputtered aluminium atoms in an electron cyclotron resonance plasma source

被引：6

作者：

Poluektov, NP ^{[1
]}

Kharchenko, VN ^{[1
]}

Kamyschov, IA ^{[1
]}

机构：

[1] Moscow State Univ Forestry, Fac Elect, Dept Phys, Mytishchi 141005 5, Moscow Region, Russia

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2003年 / 12卷 / 03期

关键词：

D O I：

10.1088/0963-0252/12/3/321

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The transverse temperature of sputtered aluminium atoms in an electron cyclotron resonance discharge has been calculated from the shapes of their Doppler broadening emission lines, which were measured with a pressure scanning Fabry-Perot interferometer. This temperature decreases from 0.8 to 0.28 eV at a distance of 17.5 cm from the Al target when krypton pressure rises from 0.4 to 4 mTorr. For a discharge in argon aluminium temperature falls from 0.5 to 0.18 eV for the same condition.

引用

页码：449 / 453

页数：5

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