Cleaning of optical surfaces by excimer laser radiation

被引：53

作者：

Mann, K

WolffRottke, B

Muller, F

机构：

[1] Laser-Laboratorium Göttingen, D-37077 Göttingen

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

关键词：

D O I：

10.1016/0169-4332(95)00459-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The effect of particle removal from Al mirror surfaces by the influence of pulsed UV laser radiation has been studied. The investigations are closely related to the demands of astronomers, who are looking for a more effective way to clean future very large telescope (VLT) mirrors [1]. A systematic parameter study has been performed in order to determine the irradiation conditions which yield the highest dust removal efficiency (i.e. reflectivity increase) on contaminated samples. The particle removal rate increases with increasing laser fluence, being limited however by the damage threshold of the coating. Data indicate that on Al coated BK7 and Zerodur samples KrF laser radiation yields the optimum result, with cleaning efficiencies comparable to polymer film stripping. The initial reflectivity of the clean coating can nearly be restored, in particular when an additional solvent film on the sample surface is applied.

引用

页码：463 / 468

页数：6

共 9 条

[1]

GIORDANO P, 1994, ESO MESSENGER, V75, P9

[2]

HONTZOPOULOS E, 1992, SPIE, V1810, P784

[3]

KELLEY JD, 1991, SPIE, V1624, P153

[4]

MANN K, 1991, P SOC PHOTO-OPT INS, V1503, P176, DOI 10.1117/12.46930

[5]

MANN K, 1994, UV LASER CLEANING VE

[6]

MANN K, 1991, SPIE, V1624, P436

[7]

MANN K, 1992, SPIE P, V1834, P184

[8] LASER-CLEANING TECHNIQUES FOR REMOVAL OF SURFACE PARTICULATES [J].

TAM, AC ;

LEUNG, WP ;

ZAPKA, W ;

ZIEMLICH, W .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (07) :3515-3523

[9] LASER CLEANING REMOVES PARTICLES FROM SURFACES [J].

ZAPKA, W ;

ZIEMLICH, W ;

LEUNG, WP ;

TAM, AC .

MICROELECTRONIC ENGINEERING, 1993, 20 (1-2) :171-183

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