Palladium based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions

被引：18

作者：

Franz, AJ ^{[1
]}

Jensen, KF ^{[1
]}

Schmidt, MA ^{[1
]}

机构：

[1] MIT, Dept Chem Engn, Cambridge, MA 02139 USA

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746859

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Novel palladium-based micromembranes have been microfabricated to allow for controlled selective hydrogen flux. These micromembranes have the potential to be used in a variety of hydrogen purification applications, as well as for hydrogenation and dehydrogenation reactions. The microfabrication process allows for integration of heaters and temperature sensors into the device. The e-beam deposited thin Pd film achieves excellent hydrogen selectivity at high permeation rates. The membrane has good mechanical strength and has been shown to withstand pressure gradients of over 5 atm. Microfabricated palladium membranes enable new applications because of their small size, fast thermal response times, and high efficiency.

引用

页码：382 / 387

页数：6

共 6 条

[1]

BASELT JP, 1998, PRIC MIN 2 INT C MIC, P13

[2]

Qin D, 1998, TOP CURR CHEM, V194, P1

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