Sintering of tin-doped indium oxide (Indium-Tin-Oxide, ITO) with Bi2O3 additive

被引:26
作者
Muraoka, M
Suzuki, M
Sawada, Y
Matsushita, J
机构
[1] Tokyo Inst Polytech, Fac Engn, Dept Ind Chem, Atsugi, Kanagawa 24302, Japan
[2] Tokai Univ, Sch Engn, Dept Appl Chem, Hiratsuka, Kanagawa 25912, Japan
关键词
D O I
10.1023/A:1004420416545
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Tin-doped indium oxide (Indium-Tin-Oxide, ITO) is known as a poorly sinterable material. Densification of ITO powders with relatively large particle size (1-2 mu m) was enhanced remarkably by the additive (Bi2O3) whose melting point is lower than the sintering temperature. The maximum bulk density of 6.75 g/cm(3) (relative density; 95%) was obtained when pressurelessly sintered in air at 1500 degrees C for 5 hours using the starting material containing 2.0 mass % Bi2O3, while the density was approximately equal to the green density when sintered using the starting material without Bi2O3. Increase of electrical resistivity caused by the additive was suppressed successfully when a small amount of Bi2O3 (1.0 mass %) was added and heated at 1500 degrees C. The bismuth was eliminated from the sintered body to achieve the low resistivity (8.1 x 10(-4) ohm cm) which was approximately equal to that of the pure ITO. (C) 1998 Kluwer Academic Publishers.
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页码:5621 / 5624
页数:4
相关论文
共 12 条
[1]  
De Wit J. H. W., 1977, SCI CERAM, V9, P143
[2]  
*INT CTR DIFFR DAT, 411445 INT CTR DIFFR
[3]  
*INT CTR DIFFR DAT, 341203 INT CTR DIFFR
[4]  
*INT CTR DIFFR DAT, 411989 INT CTR DIFFR
[5]  
*INT CTR DIFFR DAT, 441087 INT CTR DIFFR
[6]  
Kojima Y., 1992, NEW CERAM, V12, P47
[7]  
LAMBERT J, 1986, AM CERAM SOC B, V65, P673
[8]   SINTERING AND ELECTRICAL-PROPERTIES OF TITANIA-CONTAINING AND ZIRCONIA-CONTAINING IN2O3-SNO2 (ITO) CERAMICS [J].
NADAUD, N ;
NANOT, M ;
BOCH, P .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (03) :843-846
[9]   Influence of TiO2 additives on the microstructure of In2O3 ceramics [J].
Nadaud, N ;
Boch, P .
CERAMICS INTERNATIONAL, 1996, 22 (03) :207-209
[10]  
Nate T., 1992, HYOMEN GIJYUTU, V43, P20