Bit-Patterned Magnetic Recording: Theory, Media Fabrication, and Recording Performance

被引：172

作者：

Albrecht, Thomas R. ^{[1
]}

Arora, Hitesh ^{[1
]}

Ayanoor-Vitikkate, Vipin ^{[1
]}

Beaujour, Jean-Marc ^{[1
]}

Bedau, Daniel ^{[1
]}

Berman, David ^{[1
]}

Bogdanov, Alexei L. ^{[1
]}

Chapuis, Yves-Andre ^{[1
]}

Cushen, Julia ^{[1
]}

Dobisz, Elizabeth E. ^{[1
]}

Doerk, Gregory ^{[1
]}

Gao, He ^{[1
]}

Grobis, Michael ^{[1
]}

Gurney, Bruce ^{[1
]}

Hanson, Weldon ^{[1
]}

Hellwig, Olav ^{[1
]}

Hirano, Toshiki ^{[1
]}

Jubert, Pierre-Olivier ^{[1
]}

Kercher, Dan ^{[1
]}

Lille, Jeffrey ^{[1
]}

Liu, Zuwei ^{[1
]}

Mate, C. Mathew ^{[1
]}

Obukhov, Yuri ^{[1
]}

Patel, Kanaiyalal C. ^{[1
]}

Rubin, Kurt ^{[1
]}

Ruiz, Ricardo ^{[1
]}

Schabes, Manfred ^{[1
]}

Wan, Lei ^{[1
]}

Weller, Dieter ^{[1
]}

Wu, Tsai-Wei ^{[1
]}

Yang, En ^{[1
]}

机构：

[1] HGST, San Jose, CA 95138 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2015年 / 51卷 / 05期

关键词：

Areal density; bit-patterned media; block copolymer; Co alloys; double patterning; e-beam lithography; hard disk drive; interface anisotropy; magnetic multilayers; magnetic recording; nanoimprint lithography; prepatterned servo; self-assembly; sequential infiltration synthesis; templated growth; thermal annealing; write synchronization; ATOMIC LAYER DEPOSITION; BLOCK-COPOLYMER; NANOIMPRINT LITHOGRAPHY; IMPRINT LITHOGRAPHY; THIN-FILMS; DENSITY; INFILTRATION; ROUTE; INTEGRATION; SIMULATIONS;

D O I：

10.1109/TMAG.2015.2397880

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Bit-patterned media (BPM) for magnetic recording provides a route to thermally stable data recording at >1 Tb/in(2) and circumvents many of the challenges associated with extending conventional granular media technology. Instead of recording a bit on an ensemble of random grains, BPM comprises a well-ordered array of lithographically patterned isolated magnetic islands, each of which stores 1 bit. Fabrication of BPM is viewed as the greatest challenge for its commercialization. In this paper, we describe a BPM fabrication method that combines rotary-stage e-beam lithography, directed self-assembly of block copolymers, self-aligned double patterning, nanoimprint lithography, and ion milling to generate BPM based on CoCrPt alloy materials at densities up to 1.6 Td/in(2). This combination of novel fabrication technologies achieves feature sizes of <10 nm, which is significantly smaller than what conventional nanofabrication methods used in semiconductor manufacturing can achieve. In contrast to earlier work that used hexagonal arrays of round islands, our latest approach creates BPM with rectangular bit cells, which are advantageous for the integration of BPM with existing hard disk drive technology. The advantages of rectangular bits are analyzed from a theoretical and modeling point of view, and system integration requirements, such as provision of servo patterns, implementation of write synchronization, and providing for a stable head-disk interface, are addressed in the context of experimental results. Optimization of magnetic alloy materials for thermal stability, writeability, and tight switching field distribution is discussed, and a new method for growing BPM islands from a specially patterned underlayer-referred to as templated growth-is presented. New recording results at 1.6 Td/in(2) (roughly equivalent to 1.3 Tb/in(2)) demonstrate a raw error rate <10-2, which is consistent with the recording system requirements of modern hard drives. Extendibility of BPM to higher densities and its eventual combination with energy-assisted recording are explored.

引用

页数：42

共 117 条

[1]

Albrecht T. R., 2011, U. S. Patent, Patent No. [7 867 406 B2, 7867406]

[2] Bit Patterned Media at 1 Tdot/in2 and Beyond [J].

Albrecht, Thomas R. ;

Bedau, Daniel ;

Dobisz, Elizabeth ;

Gao, He ;

Grobis, Michael ;

Hellwig, Olav ;

Kercher, Dan ;

Lille, Jeffrey ;

Marinero, Ernesto ;

Patel, Kanaiyalal ;

Ruiz, Ricardo ;

Schabes, Manfred E. ;

Wan, Lei ;

Weller, Dieter ;

Wu, Tsai-Wei .

IEEE TRANSACTIONS ON MAGNETICS, 2013, 49 (02) :773-778

[3] Bit-Patterned Magnetic Recording: Nanoscale Magnetic Islands for Data Storage [J].

Albrecht, Thomas R. ;

Hellwing, Olav ;

Ruiz, Ricardo ;

Schabes, Manfred E. ;

Terris, Bruce D. ;

Wu, Xiao Z. .

NANOSCALE MAGNETIC MATERIALS AND APPLICATIONS, 2009, :237-274

[4] NEUTRON REFLECTIVITY STUDIES OF THE SURFACE-INDUCED ORDERING OF DIBLOCK COPOLYMER FILMS [J].

ANASTASIADIS, SH ;

RUSSELL, TP ;

SATIJA, SK ;

MAJKRZAK, CF .

PHYSICAL REVIEW LETTERS, 1989, 62 (16) :1852-1855

[5] Recording performances in perpendicular magnetic patterned media [J].

Asbahi, M. ;

Moritz, J. ;

Dieny, B. ;

Gourgon, C. ;

Perret, C. ;

van de Veerdonk, R. J. M. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (38)

[6] MACROSCOPIC MODEL FOR COLUMNAR GROWTH OF AMORPHOUS FILMS BY SPUTTER DEPOSITION [J].

BALES, GS ;

ZANGWILL, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (01) :145-149

[7] Polarity-Switching Top Coats Enable Orientation of Sub-10-nm Block Copolymer Domains [J].

Bates, Christopher M. ;

Seshimo, Takehiro ;

Maher, Michael J. ;

Durand, William J. ;

Cushen, Julia D. ;

Dean, Leon M. ;

Blachut, Gregory ;

Ellison, Christopher J. ;

Willson, C. Grant .

SCIENCE, 2012, 338 (6108) :775-779

[8] BLOCK COPOLYMER THERMODYNAMICS - THEORY AND EXPERIMENT [J].

BATES, FS ;

FREDRICKSON, GH .

ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1990, 41 (01) :525-557

[9]

Bencher C., 2012, P SOC PHOTO-OPT INS, V8323

[10]

Bencher C., 2011, P SOC PHOTO-OPT INS, V7970

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