Systematic study of effects of growth conditions on the (nano-, meso-, micro)size and (one-, two-, three-dimensional) shape of GaN single crystals grown by a direct reaction of Ga with ammonia

被引:35
作者
ElAhl, AMS
He, MQ
Zhou, PZ
Harris, GL
Salamanca-Riba, L
Felt, F
Shaw, HC
Sharma, A
Jah, M
Lakins, D
Steiner, T
Mohammad, SN
机构
[1] Howard Univ, Dept Elect Engn, Washington, DC 20059 USA
[2] Howard Univ, Mat Sci Res Ctr Excellence, Washington, DC 20059 USA
[3] Univ Maryland, Dept Mat & Nucl Engn, College Pk, MD 20742 USA
[4] NASA, Goddard Space Flight Ctr, Component Technol & Radiat Effects Branch, Greenbelt, MD 20771 USA
[5] AF Off Sci Res, AF Lab, Arlington, VA 22203 USA
关键词
D O I
10.1063/1.1622992
中图分类号
O59 [应用物理学];
学科分类号
摘要
A series of experiments have been conducted to systematically study the effects of growth conditions (NH3 flow rate, growth temperature, chamber pressure, and growth location) on the size (nano, meso, or micro) and the shape (one, two, or three dimensional) of GaN single crystal products grown by a direct reaction of Ga with NH3. A growth map with a wider range of experimental parameters was developed; it has three distinct zones. The size and shape of the products in every zone were found to depend on both temperature and NH3 flow rate with other growth conditions fixed. An effective surface diffusion length consisting of the Ga atomic surface diffusion length and the GaN molecular surface diffusion length, and the anisotropy of the Ga surface diffusion length and the GaN growth rate in different growth directions were introduced into the growth model, in such a way that it allowed successful explanation of all observed results. The optimal growth parameters could thus be determined, which conclusively demonstrated that nanowires with uniform diameter, clear crystal structure, length larger than 1 mm, uniform location distribution, and high yield can be obtained. Such a growth map based on in-depth understanding of the growth mechanism provides a clear direction for growing various materials with desired size and shape. (C) 2003 American Institute of Physics.
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页码:7749 / 7756
页数:8
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