Polymer-derived ceramic materials from thiol-ene photopolymerizations

被引:53
作者
Reddy, SK
Cramer, NB
Cross, T
Raj, R
Bowman, CN [1 ]
机构
[1] Univ Colorado, Dept Chem & Biol Engn, Boulder, CO 80309 USA
[2] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA
[3] Univ Colorado, Ctr Hlth Sci, Dept Restorat Dent, Denver, CO 80045 USA
关键词
D O I
10.1021/cm034291x
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A novel reaction scheme for rapidly fabricating polymer-derived ceramic structures with high aspect ratios and with controlled shape and structure is described. The reaction scheme is based largely upon a thiol-ene photopolymerization mechanism. Thiol-ene photopolymerizations offer unique advantages including high polymerization speed in the presence of little or no photoinitiator, the ability to delay gelation, and the ability to achieve high double bond conversions. The addition of thiols to polymerizable vinyl-containing ceramic precursors further enables the formation of thicker structures than traditionally achieved. Structures formed using this mechanism exhibit little warping, and upon pyrolysis the polymer structures are transformed into ceramic structures of a self-similar shape. In the pyrolysis step, structures formed using this novel mechanism exhibit shrinkage and mass loss values similar to those produced from typical ceramic precursors. Further, the photolithographic process described here is readily extendable to make complex three-dimensional ceramic microstructures and microdevices.
引用
收藏
页码:4257 / 4261
页数:5
相关论文
共 19 条
[1]   Using changes in initiation and chain transfer rates to probe the kinetics of cross-linking photopolymerizations: Effects of chain length dependent termination [J].
Berchtold, KA ;
Hacioglu, B ;
Lovell, L ;
Nie, J ;
Bowman, CN .
MACROMOLECULES, 2001, 34 (15) :5103-5111
[2]   Mechanism and modeling of a thiol-ene photopolymerization [J].
Cramer, NB ;
Davies, T ;
O'Brien, AK ;
Bowman, CN .
MACROMOLECULES, 2003, 36 (12) :4631-4636
[3]   Photopolymerizations of thiol-ene polymers without photoinitiators [J].
Cramer, NB ;
Scott, JP ;
Bowman, CN .
MACROMOLECULES, 2002, 35 (14) :5361-5365
[4]   Kinetics of thiol-ene and thiol-acrylate photopolymerizations with real-time Fourier transform infrared [J].
Cramer, NB ;
Bowman, CN .
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 2001, 39 (19) :3311-3319
[5]  
CROSS T, 2002, 15 IEEE INT C MICR E
[6]  
Jacobine AF, 1993, RAD CURING POLYM SCI, VIII, P219
[7]  
Kharasch M. S., 1938, CHEM IND, V57, P752, DOI [10.1002/jctb.5000573206, DOI 10.1002/JCTB.5000573206]
[8]   REACTIONS OF ATOMS AND FREE RADICALS IN SOLUTION .25. THE REACTIONS OF OLEFINS WITH MERCAPTANS IN THE PRESENCE OF OXYGEN [J].
KHARASCH, MS ;
NUDENBERG, W ;
MANTELL, GJ .
JOURNAL OF ORGANIC CHEMISTRY, 1951, 16 (04) :524-532
[9]   Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer? [J].
Liew, LA ;
Liu, YP ;
Luo, RL ;
Cross, T ;
An, LN ;
Bright, VM ;
Dunn, ML ;
Daily, JW ;
Raj, R .
SENSORS AND ACTUATORS A-PHYSICAL, 2002, 95 (2-3) :120-134
[10]  
Liew LA, 2001, AM CERAM SOC BULL, V80, P25