Hollowing and transfer of polymethyl methacrylate film propelled by laser ablation of triazeno polymer film

被引:16
作者
Mito, T
Tsujita, T
Masuhara, H
Hayashi, N
Suzuki, K
机构
[1] Osaka Univ, Dept Appl Phys, Suita, Osaka 5650871, Japan
[2] Hitachi Ltd, Electron Tube & Devices Div, Tokyo 1858601, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2001年 / 40卷 / 8A期
关键词
triazeno polymer film; laser ablation; ablation transfer; pyrene-doped PMMA; fluorescence microscope;
D O I
10.1143/JJAP.40.L805
中图分类号
O59 [应用物理学];
学科分类号
摘要
Utilizing the laser ablation of a triazeno polymer (TA) film as a driving force, materials transfer and patterning were successfully demonstrated. The prepared overlaid films consist of a source film, which is made of pyrene-doped polymethyl methacrylate (PMMA) and TA films, and a target neat PMMA film on a quartz plate. After pressing them together, a 248 nm laser pulse was irradiated from the back side of the source film. When the thickness of the TA film was 1.0 mum, slightly thicker than the penetration depth of TA of 600 nm, the pyrene-doped PMMA film was perfectly transferred to the target film.
引用
收藏
页码:L805 / L806
页数:2
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