Nanomechanical hydrogen sensing

被引:109
作者
Huang, XMH
Manolidis, M
Jun, SC
Hone, J
机构
[1] Columbia Univ, Dept Mech Engn, New York, NY 10027 USA
[2] Columbia Univ, Nanoscale Sci & Engn Ctr, New York, NY 10027 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1897445
中图分类号
O59 [应用物理学];
学科分类号
摘要
A nanomechanical beam resonator is used as a sensitive, specific hydrogen sensor. The beam is fabricated from AuPd alloy and tested by magnetomotive transduction at room temperature. The fundamental resonance frequency decreases significantly and reversibly at hydrogen pressures above 10(-5) Torr, whereas the frequency shifts observed for other gases are significantly smaller. The large frequency shift is likely due to the formation of interstitial hydrogen in the metal alloy lattice, which relieves the built-in tensile stress in the resonator beam. The uptake of hydrogen as measured by frequency shift is consistent with previous studies. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
相关论文
共 23 条
[21]   PRESSURE-COMPOSITION ISOTHERMS FOR PALLADIUM HYDRIDE [J].
WOLF, RJ ;
LEE, MW ;
DAVIS, RC ;
FAY, PJ ;
RAY, JR .
PHYSICAL REVIEW B, 1993, 48 (17) :12415-12418
[22]   PRESSURE-COMPOSITION ISOTHERMS FOR NANOCRYSTALLINE PALLADIUM HYDRIDE [J].
WOLF, RJ ;
LEE, MW ;
RAY, JR .
PHYSICAL REVIEW LETTERS, 1994, 73 (04) :557-560
[23]   A novel microelectronic gas sensor utilizing carbon nanotubes for hydrogen gas detection [J].
Wong, YM ;
Kang, WP ;
Davidson, JL ;
Wisitsora-at, A ;
Soh, KL .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :327-332