Formation of pyrite (FeS2) thin films by thermal sulfurization of dc magnetron sputtered iron

被引:46
作者
Soukup, R. J. [1 ]
Prabukanthan, P. [1 ]
Ianno, N. J. [1 ]
Sarkar, A. [1 ]
Kamler, C. A. [1 ]
Sekora, D. G. [1 ]
机构
[1] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2011年 / 29卷 / 01期
基金
美国国家科学基金会;
关键词
PRECURSIVE IRON; ELECTRODEPOSITION; MICROSTRUCTURE; TEMPERATURE; SULFIDATION;
D O I
10.1116/1.3517739
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Iron films deposited by direct current magnetron sputtering onto glass substrates were converted into FeS2 films by thermal sulfurization. Experiments were carried out to optimize the sulfurization process, and the formation of FeS2 thin films was investigated under different annealing temperatures and times. High quality FeS2 films were fabricated using this process, and single phase pyrite films were obtained after sulfurization in a sulfur and nitrogen atmosphere at 450 degrees C for 1 h. Film crystallinity and phase identification were determined by using x-ray diffraction. The cubic phase pyrite films prepared were p-type, and scanning electron microscopy studies exhibited a homogeneous surface of pyrite. The authors have found that the best Ohmic contact for their pyrite thin films, using inexpensive metals, was Ni. The following were chosen for the study: Al, Mo, Fe, and Ni, and the one that led to the lowest resistance, 333 Omega, was Ni. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3517739]
引用
收藏
页数:5
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