Atomic force microscope for planetary applications

被引：14

作者：

Akiyama, T

Gautsch, S

de Rooij, NF

Staufer, U

Niedermann, P

Howald, L

Müller, D

Tonin, A

Hidber, HR

Pike, WT

Hecht, MH

机构：

[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA

[2] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland

[3] CSEM, CH-2007 Neuchatel, Switzerland

[4] Nanosurf AG, CH-4410 Liestal, Switzerland

[5] Univ Basel, Inst Phys, CH-4056 Basel, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 91卷 / 03期

基金：

美国国家航空航天局;

关键词：

AFM; Mars; space; array;

D O I：

10.1016/S0924-4247(01)00602-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed, built and tested an atomic force microscope (AFM) for planetary science applications, in particular for the study of Martian dust and soil. The system consists of a controller board, an electromagnetic scanner and a micro-fabricated sensor-chip. Eight cantilevers with integrated, piezoresistive deflection sensors are aligned in a row and are engaged one after the other to provide redundancy in case of tip or cantilever failure. Silicon and molded diamond tips are used for probing the sample. Images can be recorded in both, static and dynamic operation mode. In the latter case, excitation of the resonance frequencies of the cantilevers is achieved by vibrating the whole chip with a piezoelectric disk. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：321 / 325

页数：5

共 6 条

[1] Advanced deep reactive ion etching:: a versatile tool for microelectromechanical systems [J].