White-light fringe detection based on a novel light source and colour CCD camera

被引:21
作者
Buchta, Z. [1 ]
Mikel, B. [1 ]
Lazar, J. [1 ]
Cip, O. [1 ]
机构
[1] Acad Sci Czech Republic, Inst Sci Instruments, CS-61264 Brno, Czech Republic
关键词
low-coherence interferometry; phase-crossing algorithm; CCD camera; gauge block; INTERFEROMETRY; ALGORITHM;
D O I
10.1088/0957-0233/22/9/094031
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We describe in this paper a pilot experiment of optimization of a white-light source for a low-coherence interferometry. The white-light source combines the light beams generated with colour LEDs. By modelling the white-light spectra, the contrast of a white-light interference fringe could be changed and set to the maximal value. The second part of this paper is a description of a white-light fringe analysis ensured with a low-cost colour CCD camera. The used detection technique employs a phase-crossing algorithm which identifies a zero optical path difference as the point where the phase difference between the red, green and blue parts of the white-light interference fringe becomes equal to zero. The optimized white-light source is designed to be a crucial part of an experimental setup for the surface diagnostics and automatic calibration of gauge blocks.
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页数:6
相关论文
共 11 条
[1]  
AILING T, 2008, P SOC PHOTO-OPT INS, V7155, pN1552
[2]   WHITE-LIGHT INTERFEROMETRIC THICKNESS GAUGE [J].
FLOURNOY, PA ;
WYNTJES, G ;
MCCLURE, RW .
APPLIED OPTICS, 1972, 11 (09) :1907-&
[3]   Slightly dispersive white-light spectral interferometry to measure distances and displacements [J].
Hlubina, P ;
Gurov, I ;
Chugunov, V .
OPTIK, 2003, 114 (09) :389-393
[4]  
ITOH M, 1992, P SOC PHOTO-OPT INS, V1755, P24
[5]   Scanning white light interferometry in quality control of single-point tape automated bonding [J].
Kassamakov, Ivan Vl. ;
Seppanen, Henri O. ;
Oinonen, Markku J. ;
Haeggstrom, Edward O. ;
Osterberg, J. Mathias ;
Aaltonen, Juha P. ;
Saarikko, Heirno ;
Radivojevic, Zoran P. .
MICROELECTRONIC ENGINEERING, 2007, 84 (01) :114-123
[6]   Efficient nonlinear algorithm for envelope detection in white light interferometry [J].
Larkin, KG .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (04) :832-843
[7]   PROFILOMETRY WITH A COHERENCE SCANNING MICROSCOPE [J].
LEE, BS ;
STRAND, TC .
APPLIED OPTICS, 1990, 29 (26) :3784-3788
[8]  
MATEJKA F, 1993, B CZECH SOC ELECT MI, V2, P10
[9]   Phase-crossing algorithm for white-light fringes analysis [J].
Pawlowski, ME ;
Sakano, Y ;
Miyamoto, Y ;
Takeda, M .
OPTICS COMMUNICATIONS, 2006, 260 (01) :68-72
[10]  
YANLI D, 2006, OPT LASER ENG, V45, P240