Highly aligned carbon nanotube arrays fabricated by bias sputtering

被引：13

作者：

Hayashi, N ^{[1
]}

Honda, S ^{[1
]}

Tsuji, K ^{[1
]}

Lee, KY ^{[1
]}

Ikuno, T ^{[1
]}

Fujimoto, K ^{[1
]}

Ohkura, S ^{[1
]}

Katayama, M ^{[1
]}

Oura, K ^{[1
]}

Hirao, T ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Elect Engn, Suita, Osaka 5650871, Japan

来源：

APPLIED SURFACE SCIENCE | 2003年 / 212卷

关键词：

aligned carbon nanotube; dc bias sputtering; bamboo-like structure;

D O I：

10.1016/S0169-4332(03)00121-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Vertically aligned carbon nanotube (CNT) arrays have been successfully grown on Si substrates by dc bias sputtering. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) observations revealed that the resultant arrays consisted of dense CNTs with diameters of 40-60 nm and lengths of. 300-400 nm. The CNTs were found to have a bamboo-like structure at the end of which metallic nanoparticle was formed, indicating tip growth mechanism. The energy enhancement of carbon particles is a key factor for synthesis of CNTs using dc bias sputtering system. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：393 / 396

页数：4

共 12 条

[1] Growth of aligned carbon nanotubes by biasing during growth [J].

Avigal, Y ;

Kalish, R .

APPLIED PHYSICS LETTERS, 2001, 78 (16) :2291-2293

[2] Plasma-induced alignment of carbon nanotubes [J].

Bower, C ;

Zhu, W ;

Jin, SH ;

Zhou, O .

APPLIED PHYSICS LETTERS, 2000, 77 (06) :830-832

[3]

Dresselhaus MS, 2001, CARBON NANOTUBES SYN

[4] Self-oriented regular arrays of carbon nanotubes and their field emission properties [J].

Fan, SS ;

Chapline, MG ;

Franklin, NR ;

Tombler, TW ;

Cassell, AM ;

Dai, HJ .

SCIENCE, 1999, 283 (5401) :512-514

[5] Chemical vapor deposition of methane for single-walled carbon nanotubes [J].

Kong, J ;

Cassell, AM ;

Dai, HJ .

CHEMICAL PHYSICS LETTERS, 1998, 292 (4-6) :567-574

[6] Growth model of bamboo-shaped carbon nanotubes by thermal chemical vapor deposition [J].

Lee, CJ ;

Park, J .

APPLIED PHYSICS LETTERS, 2000, 77 (21) :3397-3399

[7] Structure and growth of aligned carbon nanotube films by pyrolysis [J].

Li, DC ;

Dai, LM ;

Huang, SM ;

Mau, AWH ;

Wang, ZL .

CHEMICAL PHYSICS LETTERS, 2000, 316 (5-6) :349-355

[8] Patterned growth of individual and multiple vertically aligned carbon nanofibers [J].

Merkulov, VI ;

Lowndes, DH ;

Wei, YY ;

Eres, G ;

Voelkl, E .

APPLIED PHYSICS LETTERS, 2000, 76 (24) :3555-3557

[9] Synthesis of large arrays of well-aligned carbon nanotubes on glass [J].

Ren, ZF ;

Huang, ZP ;

Xu, JW ;

Wang, JH ;

Bush, P ;

Siegal, MP ;

Provencio, PN .

SCIENCE, 1998, 282 (5391) :1105-1107

[10] A REVIEW OF CATALYTICALLY GROWN CARBON NANOFIBERS [J].

RODRIGUEZ, NM .

JOURNAL OF MATERIALS RESEARCH, 1993, 8 (12) :3233-3250

← 1 2 →