Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: their use in the liquid injection MOCVD of titanium dioxide thin films

The new precursors [Ti(OPri)(3)(OCH2CH2NMe2)] 1 and [Ti(OPri)(2)(OCH2CH2NMe2)(2)] 2 have been prepared and characterised. Compound 1 exists in solution at room temperature as a mixture of monomer and dimer(s), however at elevated temperatures the monomer predominates. Compound 2 exists in solution predominantly as a monomeric complex presumably with pseudooctahedral coordination at the metal centre. Thin films of TiO2 have been deposited at 300-450 degrees C by liquid injection MOCVD using both 1 and 2. Analysis of the films by Auger electron spectroscopy failed to detect nitrogen although trace carbon was detected at levels of between 2.9 and 7.7%. The potential utility of these modified compounds as precursors to TiO2 is discussed.