Use of linear magnetrons for the fabrication of aluminum first-surface solar mirrors

被引：4

作者：

Correa, G

Almanza, R

Martinez, I

Mazari, M

Cheang, JC

机构：

[1] Univ Nacl Autonoma Mexico, Inst Ingn, Mexico City 04510, DF, Mexico

[2] Univ Nacl Autonoma Mexico, Inst Fis, Mexico City 01000, DF, Mexico

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1998年 / 52卷 / 3-4期

关键词：

linear magnetrons; solar mirrors; sputtering;

D O I：

10.1016/S0927-0248(97)00252-3

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Aluminum first-surface solar mirrors by sputtering processes using linear magnetrons are presented for 30 x 60 cm soda lime substrate areas. The optimum parameters are Al target-glass substrate distance 130 mm, Al evaporation pressure 6-7 x 10(-4) Torr for argon plasma, aluminum evaporation rate similar to 1.5 Angstrom/s (similar to 1000 Angstrom thickness); SiO2 target-glass substrate distance 13 cm, SiO2 evaporation pressure 2-3 x 10(-3) Torr for argon-oxygen plasma and SiO2 evaporation rate similar to 1.3 Angstrom/s (similar to 3200 Angstrom thickness). (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：231 / 238

页数：8

共 7 条

[1] FURTHER OPTION FOR SOLAR CONCENTRATORS - ALUMINUM FIRST SURFACE MIRRORS [J].