Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures

被引:930
作者
Huang, Yi-Fan
Chattopadhyay, Surojit [1 ]
Jen, Yi-Jun
Peng, Cheng-Yu
Liu, Tze-An
Hsu, Yu-Kuei
Pan, Ci-Ling
Lo, Hung-Chun
Hsu, Chih-Hsun
Chang, Yuan-Huei
Lee, Chih-Shan
Chen, Kuei-Hsien
Chen, Li-Chyong
机构
[1] Natl Chung Hsing Univ, Dept Elect Engn, Taichung 402, Taiwan
[2] Natl Taipei Univ Technol, Dept Electroopt Engn, Taipei 106, Taiwan
[3] Acad Sinica, Inst Atom & Mol Sci, Taipei 106, Taiwan
[4] Natl Chung Hsing Univ, Dept Elect Engn, Hsinchu 300, Taiwan
[5] Ind Technol Res Inst, Ctr Measurement Stand, Hsinchu 300, Taiwan
[6] Natl Chiao Tung Univ, Dept Photon, Hsinchu 300, Taiwan
[7] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 300, Taiwan
[8] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[9] Natl Taiwan Univ, Ctr Condensed Mat Sci, Taipei 106, Taiwan
[10] Natl Taiwan Univ, Dept Phys, Taipei 106, Taiwan
关键词
D O I
10.1038/nnano.2007.389
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Nature routinely produces nanostructured surfaces with useful properties, such as the self-cleaning lotus leaf, the colour of the butterfly wing, the photoreceptor in brittlestar and the anti-reflection observed in the moth eye. Scientists and engineers have been able to mimic some of these natural structures in the laboratory and in real-world applications. Here, we report a simple aperiodic array of silicon nanotips on a 6-inch wafer with a sub-wavelength structure that can suppress the reflection of light at a range of wavelengths from the ultraviolet, through the visible part of the spectrum, to the terahertz region. Reflection is suppressed for a wide range of angles of incidence and for both s- and p-polarized light. The antireflection properties of the silicon result from changes in the refractive index caused by variations in the height of the silicon nanotips, and can be simulated with models that have been used to explain the low reflection from moth eyes. The improved anti-reflection properties of the surfaces could have applications in renewable energy and electro-optical devices for the military.
引用
收藏
页码:770 / 774
页数:5
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