Growth mode and interface structure of ag on the HF-treated Si(111):H surface

被引:32
作者
Nishiyama, A
terHorst, G
Zagwijn, PM
vandenHoven, GN
Frenken, JWM
Garten, F
Schlatmann, AR
Vrijmoeth, J
机构
[1] UNIV GRONINGEN,DEPT APPL PHYS,9747 AG GRONINGEN,NETHERLANDS
[2] FOM,INST ATOM & MOLEC PHYS,1098 SJ AMSTERDAM,NETHERLANDS
[3] TOSHIBA CO LTD,ULSI RES LABS,R&D CTR,SAIWAI KU,KAWASAKI,KANAGAWA 210,JAPAN
关键词
epitaxy; medium energy ion scattering (MEIS); metal-semiconductor interfaces; Schottky barrier; silicon; silver;
D O I
10.1016/0039-6028(95)01073-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A growth mode and interface structure analysis has been performed for Ag deposited at a high temperature of 300 degrees C on the HF-treated Si(111):H surface by means of medium-energy ion scattering and elastic recoil detection analysis of hydrogen. The measurements show that Ag grows in the Volmer-Weber mode and that the Ag islands on the surface are epitaxial with respect to the substrate. The preferential azimuthal orientation is A-type only when Ag is deposited slowly. The interface does not reconstruct to the root 3x root 3-Ag structure, which is normally observed for Ag deposition above 200 degrees C on the Si(111)7 x 7 surface, but retains its bulk-like structure. The presence of hydrogen at the interface is demonstrated after deposition of thick (1100 Angstrom) Ag films. However, the amount of hydrogen at the interface is not a full monolayer. This partial desorption of hydrogen from the interface explains why the Schottky barrier heights of Ag/Si(111):H diodes are close to those of Ag/Si(111)7 x 7 and Ag/Si(111)2 x 1.
引用
收藏
页码:229 / 238
页数:10
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