Processing of powder surfaces by ion beam techniques

被引:10
作者
Ensinger, W [1 ]
机构
[1] Univ Marburg, Dept Chem, Ctr Mat Sci, D-35032 Marburg, Germany
关键词
powder treatment; catalysis; cobalt disilicide; alumina powder;
D O I
10.1016/S0168-583X(98)00825-8
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 [仪器科学与技术]; 080401 [精密仪器及机械]; 081102 [检测技术与自动化装置];
摘要
Owing to their large surface-to-bulk ratio, powders are a useful material for a large number of applications. Their properties can be influenced when the surface is modified. This can be achieved by ion beam techniques. In order to overcome the line-of-sight restriction of ion beam methods, the powder has to be agitated in the beam. Various devices for ion beam processing of powders, including ion implantation, ion beam sputter deposition, and ion beam assisted deposition, are listed. Recent results on ion beam sputter deposition of platinum on alumina and tungsten carbide and ion beam assisted deposition of cobalt silicide on silicon powder using the rotating wing-drum and the rotating spiral tube are presented. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:17 / 24
页数:8
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