Metamorphic HFETs on GaAs with InP-subchannels for device performance improvements

被引:6
作者
Gässler, C [1 ]
Ziegler, V [1 ]
Wölk, C [1 ]
Deufel, R [1 ]
Berlec, FJ [1 ]
Käb, N [1 ]
Kohn, E [1 ]
机构
[1] DaimlerChrysler AG, Res Ctr, D-89081 Ulm, Germany
来源
INTERNATIONAL ELECTRON DEVICES MEETING 2000, TECHNICAL DIGEST | 2000年
关键词
D O I
10.1109/IEDM.2000.904288
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports on 43 %-In metamorphic HFETs on GaAs with an InP-subchannel. To our knowledge, this is the first time that InP-subchannels have been used in metamorphic HFETs, The used gate length is 150nm. The composite-channel of the devices was designed to overcome the high impact ionization rate in InGaAs while maintaining the very high mobility for a low turnon resistance. The devices show excellent RF-Performance: f(max) = 300 GHz and f(t) = 188 GHz. DC-performance: I-DS,I-max = 625 mA/mm with transconductance g(max) = 850 ms/mm.
引用
收藏
页码:182 / 185
页数:4
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