Characterization of the sputtered-sliced zone plate for high energy X-rays

被引:2
作者
Kamijo, N [1 ]
Suzuki, Y
Awajia, M
Takeuchi, A
Uesugi, K
Yasumoto, M
Tamura, S
Kohmura, Y
Duevel, A
Rudolph, D
Schmahl, G
机构
[1] Kansai Med Univ, Dept Phys, Hirakata, Osaka 5731136, Japan
[2] Osaka Natl Res Inst, Osaka 5638577, Japan
[3] Univ Gottingen, Inst Xray Phys, D-37073 Gottingen, Germany
[4] SPring8, Mikazuki, Hyogo 6795198, Japan
关键词
Fresnel zone plate; hard X-ray microbeam; X-ray microscopy; synchrotron radiation;
D O I
10.1016/S0168-9002(01)00501-0
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A zone plate for hard X-rays with outermost zone width as small as 30 nm and thickness similar to 14 mum fabricated by sputtered-sliced technology was evaluated. With the brilliant X-ray beam from the undulator at the SPring-8 the minimum focal spot size attained was similar to0.8 mum at the energy of 18.6keV. The intrinsic diffraction efficiency was determined to be similar to 12%. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:868 / 871
页数:4
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