Fabrication of a hard x-ray sputtered-sliced Fresnel phase zone plate

被引：24

作者：

Kamijo, N

Tamura, S

Suzuki, Y

Handa, K

Takeuchi, A

Yamamoto, S

Ando, M

Ohsumi, K

Kihara, H

机构：

[1] HITACHI LTD,ADV RES LAB,HATOYAMA,SAITAMA 35003,JAPAN

[2] RITSUMEIKAN UNIV,SHIGA 52577,JAPAN

[3] UNIV TSUKUBA,TSUKUBA,IBARAKI 305,JAPAN

[4] NATL LAB HIGH ENERGY PHYS,PHOTON FACTORY,TSUKUBA,IBARAKI 305,JAPAN

[5] KANSAI MED UNIV,HIRAKATA,OSAKA 573,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1997年 / 68卷 / 01期

关键词：

D O I：

10.1063/1.1147851

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A Fresnel phase zone plate for hard x ray was fabricated by physical vapor deposition alternating transparent and opaque layers onto a fine gold wire core 47 mu m in diameter. The zone plate, which is comprised of 25 pairs of alternating Ag and C layers, is designed to operate with a focal length of 124 mm for a parallel beam at 8.1 keV. The thickness of the zone plate is less than 10 mu m and is capable of operating as a phase zone plate, Using the brilliant monochromatized x-ray beam from the TRISTAN Main Ring, with an undulator, the minimum focal spot size attained for the first order focal beam was 0.5 mu m phi. The light collecting efficiency was determined to be near 11%. (C) 1997 American Institute of Physics.

引用

页码：14 / 16

页数：3

共 19 条

[1]

ANDERSON EH, 1992, XRAY MICROSCOPY, V3, P75

[2] TABLETOP X-RAY MICROSCOPE USING 8 KEV ZONE PLATES [J].

BIONTA, RM ;

ABLES, E ;

CLAMP, O ;

EDWARDS, OD ;

GABRIELE, PC ;

MILLER, K ;

OTT, LL ;

SKULINA, KM ;

TILLEY, R ;

VIADA, T .

OPTICAL ENGINEERING, 1990, 29 (06) :576-580

[3] HIGH-PERFORMANCE MULTILEVEL BLAZED X-RAY MICROSCOPY FRESNEL ZONE PLATES - FABRICATED USING X-RAY-LITHOGRAPHY [J].

DIFABRIZIO, E ;

GENTILI, M ;

GRELLA, L ;

BACIOCCHI, M ;

KRASNOPEROVA, A ;

CERRINA, F ;

YUN, W ;

LAI, B ;

GLUSKIN, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06) :3979-3985

[4] DESIGN OF A GRADIENT REFRACTIVE-INDEX PHASE ZONE PLATE FOR SOFT X-RAYS [J].

FUJISAKI, H ;

NAKAGIRI, N .

APPLIED OPTICS, 1990, 29 (04) :483-488

[5] FOCUSING OPTICS FOR A SYNCHROTRON X-RADIATION MICROPROBE [J].

ICE, GE ;

SPARKS, CJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 222 (1-2) :121-127

[6] FABRICATION AND TESTING OF HARD X-RAY SPUTTERED-SLICED ZONE-PLATE [J].

KAMIJO, N ;

TAMURA, S ;

SUZUKI, Y ;

KIHARA, H .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (02) :2132-2134

[7] FORMATION OF OPTICAL IMAGES BY X-RAYS [J].

KIRKPATRICK, P ;

BAEZ, AV .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1948, 38 (09) :766-774

[8] HARD X-RAY PHASE ZONE PLATE FABRICATED BY LITHOGRAPHIC TECHNIQUES [J].

LAI, B ;

YUN, WB ;

LEGNINI, D ;

XIAO, Y ;

CHRZAS, J ;

VICCARO, PJ ;

WHITE, V ;

BAJIKAR, S ;

DENTON, D ;

CERRINA, F ;

DIFABRIZIO, E ;

GENTILI, M ;

GRELLA, L ;

BACIOCCHI, M .

APPLIED PHYSICS LETTERS, 1992, 61 (16) :1877-1879

[9]

MEYERILSE W, 1992, XRAY MICROSCOPY, V3, P284

[10] CHARACTERIZATION OF SLICED MULTILAYER ZONE PLATES FOR HARD X-RAYS [J].

SAITOH, K ;

INAGAWA, K ;

KOHRA, K ;

HAYASHI, C ;

IIDA, A ;

KATO, N .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) :1519-1523

← 1 2 →