FABRICATION AND TESTING OF HARD X-RAY SPUTTERED-SLICED ZONE-PLATE

被引：9

作者：

KAMIJO, N

TAMURA, S

SUZUKI, Y

KIHARA, H

机构：

[1] HITACHI LTD,ADV RES LAB,HATOYAMA,SAITAMA 35003,JAPAN

[2] KANSAI MED UNIV,HIRAKATA,OSAKA 573,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.1145750

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A sputtered-sliced hard x-ray zone plate has been made by the physical vapor deposition of alternating transparent and opaque layers onto a fine gold wire core of 50 μm diameter. The zone plate is designed to operate with a focal length of 124 mm at 8.05 eV and consists of 25 pairs of alternating Ag and C layers with a thickness of ∼40 μm along the wire axis. Using monochromized synchrotron x ray with an energy of 8.05 keV the minimum focal spot size attained for the first order focal beam was 2.3 μm in the vertical and horizontal directions, respectively. The light-collecting efficiency was determined to be ∼4%. The focal spot size obtained was substantially larger than the 1.2 μm φ spatial resolution predicted from the contradiction of the light source size. © 1995 American Institute of Physics.

引用

页码：2132 / 2134

页数：3

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