Convection-based micromachined inclinometer using SOI technology

被引：29

作者：

Billat, S ^{[1
]}

Glosch, H ^{[1
]}

Kunze, M ^{[1
]}

Hedrich, F ^{[1
]}

Frech, J ^{[1
]}

Auber, J ^{[1
]}

Lang, W ^{[1
]}

Sandmaier, H ^{[1
]}

Wimmer, W ^{[1
]}

机构：

[1] Hahn Schnickard Gesell, Inst Micromachining & Informat Technol, IMIT, HSG, D-78052 Villingen Schwenningen, Germany

来源：

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年

关键词：

D O I：

10.1109/MEMSYS.2001.906504

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel inclinometer operating with the free-convection heat transfer principle which has been developed at the HSG-IMIT for the VOGT electronic company. The use of SOI-technology permits a short technological process for the sensor fabrication and a very good mechanical stability like a high reproducibility. Using free convection properties the sensor presents a high resolution (0.007 degrees), a great sensitivity and baseline stability.

引用

页码：159 / 161

页数：3

共 4 条

[1] Micromachined accelerometer based on convection heat transfer [J].

Leung, AM ;

Jones, J ;

Czyzewska, E ;

Chen, J ;

Woods, B .

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, :627-630

[2]

Milanovic V., 1998, Micro-Electro-Mechanical Systems (MEMS) - 1998. ASME International Mechanical Engineering Congress and Exposition, P487

[3]

PLOCHINGER H, 1992, Patent No. 4243978

[4] Application of a microflown as a low-cost level sensor [J].

van Honschoten, J ;

van Baar, J ;

de Bree, HE ;

Lammerink, T ;

Krijnen, G ;

Elwenspoek, M .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2000, 10 (02) :250-253

← 1 →