Thermal conductivity of AlN ceramics sintered with CaF2 and YF3
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Qiao, L
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Tsing Hua Univ, Dept Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsing Hua Univ, Dept Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Qiao, L
[1
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Zhou, HP
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机构:Tsing Hua Univ, Dept Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Zhou, HP
Fu, RL
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机构:Tsing Hua Univ, Dept Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Fu, RL
机构:
[1] Tsing Hua Univ, Dept Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] China Univ Min & Technol, Coll Mech Elect & Mat Engn, Xuzhou 221008, Peoples R China
Dense AlN ceramics with a thermal conductivity of 180W/m(.)K were obtained at the sintering temperature of 1750 degreesC using CaF2 and YF3 as additives. At temperatures below 1650 degreesC, the shrinkage of AlN ceramics is promoted by liquid (Ca,Y)F-2 and Ca12Al14O32F2. Liquid CaYAlO4 mainly improves the densification of the sample when the sintering temperature increases to 1750 degreesC. The formation of liquid (Ca,Y)F-2 at a relatively low temperature results in homogeneous YF3 distribution around the AlN particles, which benefits the removal of oxygen impurity in the AlN lattice, and thus a higher thermal conductivity. (C) 2003 Elsevier Ltd and Techna S.r.l. All rights reserved.